Blogs
MTI Instruments Legacy Products
For information or support on legacy products contact MTI Instruments directly at MTISales@Vitrek.com. Accumeasure Wireless A low bandwidth solution for applications where wires are impossible. View Legacy Product Gap Measurement Probes A high-speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials. View Legacy Product PV1000 Photovoltaic/Solar Metrology System Suitable for industrial deployment, this pre-calibrated capacitive gap sensor system provides highly accurate measurements to a grounded metal target. View Legacy Product Thickness Gauge System Suitable for [...]
OEM Capacitance
CUSTOM CAPACITANCE SENSORS Measure displacement and gap with non-contact force at sub-micron resolution. Ideal for applications such as lobing, lens focusing, Piezo positioning, sheet metal thickness, gap measurement, as well as flatness and alignment test applications. Capacitance Displacement and Gap Measurement Probes MTI offers probes for grounded targets using single-ended probes and for ungrounded or poorly grounded targets using push/pull probes. Accumeasure OEM Boards The Accumeasure MicroCap is a compact, custom designed, OEM capacitance board for high-precision non-contact displacement, thickness and gap measurement.
WAFER QA/QC AFTER SLICING AND POLISHING
Industry Semiconductor Applications Wafer Qa/Qc After Slicing And Polishing Measurement Type Surface Description When wafers are sliced up with wire saws, they are measured to make sure they are within the specified thickness, with minimal bow, warp, and TTV. After initial measurement, they are sorted and sent for polishing. Since polishing removes material and smoothes out the rough surfaces they need to be measured again to ensure they meet thickness guidelines and quality standards. Solution: MTI Instruments manufactures multiple systems to perform thickness measurements. From semi automated Proforma 300SA to manual wafer [...]
ABOUT WAFER BOW AND WARP MEASUREMENT SYSTEMS
Thickness Measurement for Metrology Systems ASTM F657: The distance through a wafer between corresponding points on the front and back surface. Thickness is expressed in microns or mils (thousandths of an inch). Total Thickness Variation (TTV) ASTM F657: The difference between the maximum and minimum values of thickness encountered during a scan pattern or series of point measurements. TTV is expressed in microns or mils (thousandths of an inch). ASTM F534 3.1.2: The deviation of the center point of the median surface of a free, unclamped wafer from the median [...]
GAAS SUBSTRATE THICKNESS MEASUREMENT
Industry Semiconductor Applications Gaas Substrate Thickness Measurement Measurement Type Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction: Silicon wafers are ordinarily highly conductive and easy to measure with standard capacitive displacement sensors (See MTI’s Proforma 300i). Measuring the thickness of GaAs wafers that have high bulk resistivity (>10k Ohm/cm) is a little more difficult because the wafers act as non-conductive insulators in a capacitive sensor’s measuring field. Fortunately, MTI has a solution to this problem. Solution: It’s possible to measure the thickness and TTV of high resistivity semiconducting wafers (like GaAs) using non-contact capacitive [...]
Standard Capacitance Probes
P/N Model Measurement Range Min. Range Stand-Off Resolution Spot Size Interface Type Request Info 8100-0001-000 Capacitance Probe: ASP-25M-CTA 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 10x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) 1.09mm (0.043in) SMA connector CTA Request Info 8100-0002-000 Capacitance Probe: ASP-50M-CTA 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 9x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm(0.119µin) 1.55mm (0.061in) SMA connector CTA Request Info 8100-0003-000 Capacitance Probe: ASP-125M-CTA 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 10x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) 2.49mm (0.098in) SMA connector CTA Request Info 8100-0004-000 Capacitance Probe: ASP-250M-CTA 250µm (10mil/s) 12.7µm (0.5mil/s) Max. [...]
Accumeasure Probes
High resolution, low cost sensors to measure gap and displacement in industries such as semiconductor, electronics, R&D applications and many more. For grounded targets MTI offers standard capacitance probes. For ungrounded or poorly grounded targets MTI offers push/pull dual sensor probes. Both types of probes are available in stainless steel construction or flat and flexible polyimide construction. Polyimide flat probes are perfect for gap applications or confined spaces. How Probe Sensors Work Standard capacitive sensors require the target to be electrically grounded (for position, gap and vibration measurement applications). Current flows from the probe face to the target and back [...]
Push/Pull capacitance probes
Model Specifications: Push/Pull Capacitance Probes P/NModelMeasurement RangeLinearityMin. RangeStand-OffSpot SizeInterfaceTypeRequest Info 8200-2104-420PP Probe: ASP-250MD-ILA/PP250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 7x9.45 mmSMA connectorsILARequest Info 8200-2114-420PP Probe: ASP-250MD-ILA/PP Ext250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 8x11.58 mmSMA connectorsILARequest Info 8200-3104-420PP Probe: ASP-250MD-ILR/PP250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 7x7.11 mmSMA connectorsILRRequest Info 8200-2109-420PP Probe: ASP-350MD-ILA/PP350µm (14mil/s)0.02% FSR35µm (1.4mil/s)Max. Range Extension: 7x11.58 mmSMA connectorsILARequest Info 8200-2003-420PP Probe: ASP-125MR-ILA/PP125µm (5mil/s)0.02% FSR12.5µm (0.5mil/s)Max. Range Extension: 7x7.42 mmSMA connectorsILARequest Info 8200-2004-420PP Probe: ASP-250MR-ILA/PP250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 7x10.26 mmSMA connectorsILARequest Info 8200-2014-420PP Probe: ASP-250MR-ILA/PP Ext250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 8x12.83 mmSMA connectorsILARequest Info 8200-2005-420PP Probe: ASP-500MR-ILA/PP500µm (20mil/s)0.02% [...]
GLASS THICKNESS
Industry Consumer Electronics Applications Glass Thickness Measurement Type Thickness Description Did you know that glass thickness can be measured with a capacitance probe? You will need some equipment: Digital Accumeasure D200 ASP-2500-CTA Dielectric probe (The capacitance probe has a sensing area of 11.25 mm) Range extension = 3X, 10Hz filter Introduction: An industrial glass fabricator needed a way to determine the thickness of glass, before cutting it to shape and coating it. The glass sample was marked with indices to find the measuring points. The sample center point -5- thickness was [...]
FLAT CAPACITANCE PROBES
P/NModelMeasurement RangeLinearityMin. RangeStand-OffResolutionSpot SizeInterfaceTypeRequest Info 8300-0001-000Capacitance Probe: AFP-250M-CTR/SE250µm (10mil/s)12.7µm (0.5mil/s)Max. Range Extension: 9x@15kHz: 1.4nm (0.054µin) – @10kHz: 0.4nm (0.015µin)3.55mm (0.139 in)MMCX connectorsCTRRequest Info 8300-0002-000Capacitance Probe: AFP-500M-CTR/SE500µm (20mil/s)25.4µm (1mil/s)Max. Range Extension: 3x@15kHz: 2.7nm (0.108µin) – @10kHz: 0.8nm (0.031µin)5.02mm (0.198 in)MMCX connectorsCTRRequest Info 8300-0003-000Capacitance Probe: AFP-1250M-CTR/SE1250µm (50mil/s)63.5µm (2.5mil/s)Max. Range Extension: 2x@15kHz: 6.9nm (0.270µin) – @10kHz: 2.0nm (0.077µin)7.93mm (0.312 in)MMCX connectorsCTRRequest Info 8300-0004-000Capacitance Probe: AFP-2500M-CTR/SE2500µm (100mil/s)127µm (5mil/s)Max. Range Extension: 2x@15kHz: 13.7nm (0.541µin) – @10kHz: 3.9nm (0.155µin)11.22mm (0.442 in)MMCX connectorsCTRRequest Info 8300-0005-000Capacitance Probe: AFP-5000M-CTR/SE5000µm (200mil/s)254µm (10mil/s)Max. Range Extension: 2x@15kHz: 27.5nm (1.081µin) – @10kHz: 7.9nm (0.309µin)15.86mm (0.624 in)MMCX connectorsCTRRequest Info 8400-0001-000Capacitance Probe: AFP-250MD-CTR/PP250µm (10mil/s)0.02% FSR12.7µm [...]