For information or support on legacy products contact MTI Instruments directly at MTISales@Vitrek.com. Accumeasure Wireless A low bandwidth solution for applications where wires are impossible. View Legacy Product Gap Measurement Probes A high-speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and [...]
CUSTOM CAPACITANCE SENSORS Measure displacement and gap with non-contact force at sub-micron resolution. Ideal for applications such as lobing, lens focusing, Piezo positioning, sheet metal thickness, gap measurement, as well as flatness and alignment test applications. Capacitance Displacement and Gap Measurement Probes MTI offers probes for grounded targets using single-ended probes and for ungrounded or [...]
Industry Semiconductor Applications Wafer Qa/Qc After Slicing And Polishing Measurement Type Surface Description When wafers are sliced up with wire saws, they are measured to make sure they are within the specified thickness, with minimal bow, warp, and TTV. After initial measurement, they are sorted [...]
Thickness Measurement for Metrology Systems ASTM F657: The distance through a wafer between corresponding points on the front and back surface. Thickness is expressed in microns or mils (thousandths of an inch). Total Thickness Variation (TTV) ASTM F657: The difference between the maximum and minimum values of thickness encountered [...]
Industry Semiconductor Applications Gaas Substrate Thickness Measurement Measurement Type Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction: Silicon wafers are ordinarily highly conductive and easy to measure with standard capacitive displacement sensors (See MTI’s Proforma 300i). Measuring the thickness of GaAs wafers that have high bulk [...]
P/N Model Measurement Range Min. Range Stand-Off Resolution Spot Size Interface Type Request Info 8100-0001-000 Capacitance Probe: ASP-25M-CTA 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 10x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) 1.09mm (0.043in) SMA connector CTA Request Info 8100-0002-000 Capacitance Probe: ASP-50M-CTA 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 9x @50Hz: 0.3nm (0.012µin) [...]
High resolution, low cost sensors to measure gap and displacement in industries such as semiconductor, electronics, R&D applications and many more. For grounded targets MTI offers standard capacitance probes. For ungrounded or poorly grounded targets MTI offers push/pull dual sensor probes. Both types of probes are available in stainless steel construction or flat and flexible [...]
Model Specifications: Push/Pull Capacitance Probes P/NModelMeasurement RangeLinearityMin. RangeStand-OffSpot SizeInterfaceTypeRequest Info 8200-2104-420PP Probe: ASP-250MD-ILA/PP250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 7x9.45 mmSMA connectorsILARequest Info 8200-2114-420PP Probe: ASP-250MD-ILA/PP Ext250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 8x11.58 mmSMA connectorsILARequest Info 8200-3104-420PP Probe: ASP-250MD-ILR/PP250µm (10mil/s)0.02% FSR25µm (1mil/s)Max. Range Extension: 7x7.11 mmSMA connectorsILRRequest Info 8200-2109-420PP Probe: ASP-350MD-ILA/PP350µm (14mil/s)0.02% FSR35µm (1.4mil/s)Max. Range Extension: [...]
Industry Consumer Electronics Applications Glass Thickness Measurement Type Thickness Description Did you know that glass thickness can be measured with a capacitance probe? You will need some equipment: Digital Accumeasure D200 ASP-2500-CTA Dielectric probe (The capacitance probe has a sensing area of 11.25 mm) [...]
P/NModelMeasurement RangeLinearityMin. RangeStand-OffResolutionSpot SizeInterfaceTypeRequest Info 8300-0001-000Capacitance Probe: AFP-250M-CTR/SE250µm (10mil/s)12.7µm (0.5mil/s)Max. Range Extension: 9x@15kHz: 1.4nm (0.054µin) – @10kHz: 0.4nm (0.015µin)3.55mm (0.139 in)MMCX connectorsCTRRequest Info 8300-0002-000Capacitance Probe: AFP-500M-CTR/SE500µm (20mil/s)25.4µm (1mil/s)Max. Range Extension: 3x@15kHz: 2.7nm (0.108µin) – @10kHz: 0.8nm (0.031µin)5.02mm (0.198 in)MMCX connectorsCTRRequest Info 8300-0003-000Capacitance Probe: AFP-1250M-CTR/SE1250µm (50mil/s)63.5µm (2.5mil/s)Max. Range Extension: 2x@15kHz: 6.9nm (0.270µin) – @10kHz: 2.0nm (0.077µin)7.93mm [...]
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