Proforma 300i

Non-Contact Semiconductor Wafer Metrology

Capacitance-based differential measurement built for semiconducting and semi-insulating wafers. Deliver precise thickness and bow assessment, exceptional accuracy across all materials, and seamless integration using proprietary MTI Push/Pull technology.

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Vitrek V10X Series Hipot Tester

Up to 1700 µm Range

±0.25 µm Accuracy

Thickness, Bow & Warp

Non-Contact Capacitance

Ethernet, RS232 & USB

76 mm to 300 mm Wafers

PRECISE. NON-CONTACT. COST-EFFECTIVE.

Manual Semiconductor Metrology System

The Proforma 300i wafer thickness gauge is a capacitance-based, differential measurement system that performs completely non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI’s proprietary Push/Pull technology, the Proforma 300i does not require wafers to have a consistent electrical ground, resulting in exceptional accuracy and dependability across a diverse range of materials. Designed as a highly capable, cost-effective alternative to fully automated inspection systems, it streamlines quality control and ensures your wafers meet strict surface specifications.

  • Provides highly accurate, non-contact measurement of thickness, bow, warp, and TTV.
  • Measures all wafer materials including Silicon, Gallium-Arsenide (GaAs), Indium-Phosphide, sapphire, and tape.
  • Proprietary Capacitance Circuitry delivers an exceptional ±0.25 µm accuracy and up to 1700 µm range.
  • Accommodates a flexible 76 mm to 300 mm diameter wafer range.
  • Includes built-in wafer stops for exact centering and optional wafer measurement rings.
  • Equipped with a front USB port to enable easy storage of measurements and data directly to flash drives.
  • Features an Ethernet interface and includes full Windows-compatible remote control operating software.

  • A cost-effective manual alternative to fully automated wafer measurement and inspection systems.

Engineered for Today’s Semiconductor Quality Control Environments

STREAMLINE INSPECTION

Rapid, non-contact measurements with seamless network data logging

IMPROVE ACCURACY

Proprietary Push/Pull capacitance delivers ±0.25 µm precision you can trust

PROTECT WAFERS

100% non-contact differential measurement prevents surface damage and contamination

REDUCE COST OF TEST

A highly capable, cost-effective alternative to fully automated inspection systems
  • Front USB port enables easy storage of measurements and other data to flash drives
  • MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
  • Non-contact measurements
  • 76-300 mm diameter wafer range
  • Optional wafer measurement rings
  • Wafer stops for exact centering
  • Ethernet interface
  • Full remote control software (Windows compatible)
  • Optional calibration wafers
Industry Measurement Type Applications
Semiconductor Thickness GaAs substrate thickness measurement
Semiconductor Surface Wafer Thickness, Bow, Warp and TTV
Semiconductor Surface Wafer QA/QC after slicing and polishing
Semiconductor Surface Wafer Characterization
Product Info Technical Specifications
P/N Model Measurement Range Accuracy Resolution Interface Type Frequency Response Request Info
8000-6760-001 Proforma 300i 1700µm (66.9mil/s) ±0.25 µm 0.05µm RS232 and Ethernet Desktop System 16.6Hz Request Infomation on Proforma 300i
8000-6760-002 Proforma 300Gi 1700µm (66.9mil/s) ±0.25 µm 0.05µm RS232 and Ethernet Desktop System 16.6Hz Request Infomation on Proforma 300Gi
P/N Image Model Product Description
8000-6563 base rings Base Rings 50.8mm (2″) Base rings are required for BOW measurements
8000-6552 base rings Base Rings 76.2mm (3″) Base rings are required for BOW measurements
8000-6548 base rings Base Rings 100mm (4″) Base rings are required for BOW measurements
8000-6553 base rings Base Rings 125mm (5″) Base rings are required for BOW measurements
8000-6564 base rings Base Rings 152.4mm (6″) Base rings are required for BOW measurements
8000-6565 base rings Base Rings 203.25mm (8″) Base rings are required for BOW measurements
2000-2000 photo not available Calibration Standard Silicon (Si) wafer

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Proforma 300i wafer thickness gauge, including for semiconductor wafers
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