Accumeasure Capacitance Collage

Accumeasure Series

Technology-driven measurement solutions for high resolution gap applications.

The Accumeasure product line offers affordable, precise measurement solutions for a wide range of environmental conditions and configurations.

The Accumeasure product line features capacitive sensor products for high resolution gap and displacement measurements that require a high level of accuracy that is both stable and repeatable. A capacitive sensing system consists of a probe and amplifier. Capacitive measurements can be performed in a multitude of environments using non-contact passive capacitance probes that are not affected by magnet fields, temperature, humidity, nuclear radiation, and pressure. This is largely due to the nature of the rugged and passive capacitance probes.

Extremely high-precision and high linearity amplifiers make these systems ideal for critical measurements in X-Y stages, rotating spindles, shaft position, armature gap, disk position, and piezo electric positioning applications. MTI engineering guarantees a highly stable, accurate and low noise amplifier design with an attention to fast response time.

Thousands of MTI’s products are used globally in the semiconductor, automotive, aviation, electronics, and medical industries. As the leader in capacitance technology with decades of experience, MTI stands behind the quality and performance of the most demanding user environments.

Product Comparison

FeatureAccumeasure HDAccumeasure DAccumeasure MicroCapAccumeasure AS-56XAccumeasure Wireless
Resolutionpmnmnmμm/nmμm
Linearity (% FSR)±0.01±0.01±0.02±0.02±0.3
OutputDigitalDigital/AnalogAnalogAnalogDigital
Bandwidth (Hz)5,000 Hz5,000 Hz5,000 Hz5,000 Hz1.5 Hz

In Process or Desktop Solutions

A system consists of a capacitance amplifier packaged in an enclosure ideal for lab or in-process systems and a capacitance probe or probes as several of MTI’s solutions incorporate multiple channels.

Accumeasure High Definition Digital

Accumeasure HD

Picometer resolution with up to 2 mm range. Accuracy to 0.01 % of full scale range. It has built in digitally controlled low pass cutoff filters, adjustable sample rate and data logging features. Display your data right on your PC or HMI. USB and Ethernet ports provide digital connectivity at 100 megabit speeds. The amplifier has Digital output only as analog output would only corrupt the high resolution data. 1-2 channels in a small compact enclosure. Only 24 VDC industrial power is needed.

Accumeasure Digital

Accumeasure D

Sub-micron resolution with up to 12 mm range. Accuracy to 0.01 % of the full-scale range. It has built in digitally controlled low pass cutoff filters, adjustable sample rate and data logging features. Display data right on your PC or HMI. USB and Ethernet ports provide digital connectivity at 100 megabit speeds. Analog outputs are also available. 1-4 channels in a small compact enclosure. Only 24 VDC industrial power is needed.

Accumeasure 9000 and Accumeasure 500 Rack

Accumeasure 9000 & 500 Rack

AS-9000 is an analog output, high-resolution, capacitance-based instrument that provides the perfect solution to many previously unattainable measurement applications. The AS-500 is a multi channel rack system that accepts up to 6 capacitance amplifiers (AS-562-PA or AS-563-PA) .

They deliver nanometer level resolution for ultra-high-precision measurements (and work with most MTI probes). The AS-9000 and AS-500 rack require the probes to have BNC connectors or SMA to BNC adapters. Both have built in power supplies and an oscillator to drive the amplifier boards.

PCB OEM Boards for Embedded Applications

A system consists of a printed circuit board (PCB) capacitance amplifier, probe and coax cable. The customer provides the enclosure and power supply. MTI provides the connector interface. Probes require a MCX connector or BNC depending on the amplifier chosen.

Accumeasure MicroCap

Our smallest OEM PCB footprint. Sub micron resolution, with up to 25 mm range . 0 to + 10 volt analog output.
Requires +/- 15 VDC analog power supply. Linearity ac- curacy to 0.1 % of full scale range up to 5kHz bandwidth. Frequency response must be specified at time of order.

Accumeasure AS-56X

Sub micron resolution , with up to 25 mm range . 0 to + 10 volt analog output. Requires +/- 15 VDC analog power supply. Linearity accuracy to 0.05 % of full scale range, up to 5kHz bandwidth. Frequency response must be specified at time of order. Frequency response is set by plug in low pass filter. Offset and gain pots for user adjustments. The Accumeasure AS-562 can also operate with ungrounded targets typically for semiconductor wafer applications.

Probes and Probe Systems

Probes need to be mated with a capacitance amplifier. Some probes have integral leads, others require selecting a coaxial cable assembly. MTI works with OEM clients to make custom probes meeting specific application needs.

Accumeasure Probes

Accumeasure Probes

MTI provides a wide range of various probe types for all the above amplifiers. They include robust stainless-steel probes with integral leads or quick disconnect coaxial connectors. We also have ultra-thin polyimide probes , PCB probes and  push pull probes for ungrounded targets. MTI designs and manufactures probes for OEM or single sensor sales.   If you don’t see what you need, contact us for a quote on a custom probe.

Technology Principles

MTI capacitance measurement system is based on the principle of parallel plate capacitor measurement. The electrical capacitance formed between a capacitance probe and a target surface varies as a function of the distance (gap) between these two surfaces. Capacitance-based measurement probes have long been employed as a means of non-contact measurement of electrically conductive materials. In a typical system, MTI’s capacitance probe acts as one of the plates and the grounded target the other plate. MTI’s amplifier converts the gap’s capacitance into an output voltage proportional to the gap. Capacitive measurements are very stable rivaling interferometer accuracy. The Capacitance sensors are not adversely affected by temperature, humidity and pressure.

A Closer Look at Some of Our Accumeasure Series Products

The Accumeasure Series is engineered to deliver accurate, reliable, and efficient measurements, ensuring unparalleled performance across various industrial applications. We provide fantastic products, and our Accumeasure Series products are representative of MTI Instrument’s ability to deliver products that lead the way in numerous operations. Take a closer look below.

Accumeasure HD

Our Accumeasure HD is a high-precision, two-channel capacitance-based displacement measurement instrument designed for conductive targets. This advanced tool offers picometer-scale resolution through external preamplifiers that effectively eliminate parasitic capacitance effects.

The Accumeasure HD provides a measurement range of 0 to 2mm and boasts an impressively low noise level of ≤ 0.0000001 √(Hz) FSR. With a digital resolution of 1 pm, it ensures precise measurements every time. Further enhancing its accuracy is the long-term stability of 20ppm/month or better at 20°C and a digital linearity accuracy of ±0.01% FSR.

Equipped with digital communication capabilities via Ethernet or USB, this instrument offers programmable bandwidth and range extension capabilities, making it a versatile tool for various applications. Its digital frequency response reaches up to 5kHz.

Accumeasure Digital Capacitance System D Series Gen 3

MTI Instruments is proud to introduce the Accumeasure Digital Capacitance System D Series Gen 3, a high-precision capacitance displacement sensor designed for industrial and research applications. This innovative system directly converts capacitive electric field measurements into a 24-bit digital reading, ensuring accurate determination of position, thickness, motion, and vibration.

The D Series Gen 3 stands out for its ability to eliminate common errors found in analog amplifiers. Through advanced technology, it bypasses issues related to analog filtering and linearization, promising nanometer accuracy and stability. These features make it an ideal choice for industries requiring high precision, including the semiconductor, electronics, and R&D sectors.

Accumeasure Analog Capacitance System

The Accumeasure Analog Capacitance System is an ultra-high-precision, capacitance-based measurement tool. This instrument is recognized for its nanometer-level resolution, making it ideal for a variety of metrology tasks.

Compact and lightweight, this system is easy to set up and operate. It is designed to measure various parameters, including stage position, metal thickness, semiconductor wafer thickness, and rotating shaft runout. Its high precision makes it a valuable tool in industries where accuracy is very important. For those seeking an accurate, versatile, and user-friendly measurement tool, the Accumeasure Analog Capacitance System is a top contender.

Accumeasure AS-500 Modular Capacitance Rack System

The AS-500 is engineered for high-resolution and accurate measurements of position, thickness, dynamic motion, vibration, and runout of conductive and semiconducting materials. Its use extends to in-vehicle testing scenarios such as brake rotor assessment, axle runout evaluation, and thermal expansion testing.

The system includes the advanced AS-562 and AS-563 capacitance probe amplifiers. The AS-562 is designed to work with push/pull probes for measuring ungrounded targets, while the AS-563 specializes in measuring the position of grounded targets. With its modular design, the AS-500 allows for customization according to the desired number of measurement channels, catering to all our customer requirements.

Accumeasure OEM Boards

MTI’s Accumeasure OEM Boards are your solution to high-precision non-contact displacement, thickness, and gap measurement. These compact capacitance boards are custom-designed with micro-positioning, thermal correction, focusing, and closed-loop control.

Our Accumeasure OEM Boards stand out for their sub-nanometer resolution, extreme stability, exceptional repeatability, and rapid response time. These features make them a top choice for Original Equipment Manufacturers (OEMs) seeking tailored measurement solutions. These boards also incorporate MTI Instrument’s latest capacitance amplifier design, leveraging over 60 years of product line history.

Get Your Accumeasure Capacitance Sensors Today From MTI

Our Accumeasure Capacitance Sensors represent the pinnacle of precision, reliability, and efficiency in measurement technology. We invite you to explore these innovative solutions, each designed to meet diverse application needs and deliver the performance your industry is looking for. For exceptional quality and trusted expertise, look no further than MTI Instruments.