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High resolution, low cost sensors to measure gap and displacement in industries such as semiconductor, electronics, R&D applications and many more.
For grounded targets MTI offers standard capacitance probes. For ungrounded or poorly grounded targets MTI offers push/pull dual sensor probes. Both types of probes are available in stainless steel construction or flat and flexible polyimide construction. Polyimide flat probes are perfect for gap applications or confined spaces.
Learn more about our capacitance probes in these brochures:
- Cable and Probe Temperature Rating: -130°C (-202°F) to 200°C (392°F) Cryogenic and higher temperature probes are available up to 1200°C consult MTI Factory. A BNC to SMA adapter is required
- Connector Temperature Rating: -65°C (-85°F) to 85°C(185°F)
- Accuracy1: ±0.01% FSR or better, of range when probe and amplifier are calibrated to a known standard at x1 Range extension.
- Probe and Cable Interchangeability: Accurate to within ± 0.2% at x1 range extension without recalibration
- Pressure Rating Standard: 1400kPa (200 psig)
- Material: Stainless steel construction, no active internal electronics
- Highly flexible Cable for ILR/ILA/PSR Probes: 1m (3.28′) length – see options for extension cables. Connector type probes require selection of cable assembly upon ordering
How Probe Sensors Work
Standard capacitive sensors require the target to be electrically grounded (for position, gap and vibration measurement applications). Current flows from the probe face to the target and back to the amplifier to complete the circuit. The capacitance between probe and target is proportional to the distance and converted to a 0 – 10V output from the amplifier. The measurement of electrically grounded targets can be, however, affected by changes in the electrical conductivity or ground path of the target.
Push/Pull Capacitance Probes for Ungrounded Targets or Poorly Grounded Targets
To eliminate the effects of these variations, MTII developed a unique version of the Accumeasure sensor called the push-pull. In this design each probe consists of two capacitance sensors, built into one probe body. Each sensor is driven at the same voltage, however, there is a 180 degree phase shift between signals. This shift allows the current path to travel across the target surface rather than through the target to ground, eliminating any inaccuracies created by poorly grounded targets. Additionally, highly resistive targets can be measured with this technology allowing capacitance sensors to be used on semi-insulating and semi-conducting targets (for position, gap and vibration measurement applications).
For This Product
| INDUSTRY | MEASUREMENT TYPE | APPLICATIONS |
|---|---|---|
| Consumer Electronics | Positioning | Height Gap of inkjet printers |
| Consumer Electronics | Thickness | Glass Thickness |
| Automotive | Surface | Brake Rotors |
Model Specifications: Standard Capacitance Probes
| P/N | Model | Measurement Range | Min. Range | Stand-Off | Resolution | Spot Size | Interface | Type | Request Info |
|---|---|---|---|---|---|---|---|---|---|
| 8100-0001-000 | Capacitance Probe: ASP-25M-CTA | 25µm (1mils) | 1.27µm (0.05mils) | Max. Range Extension: 10x | @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) | 1.09mm (0.043in) | SMA connector | CTA | Request Info |
| 8100-0002-000 | Capacitance Probe: ASP-50M-CTA | 50µm (2mils) | 2.54µm (0.1mils) | Max. Range Extension: 9x | @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm(0.119µin) | 1.55mm (0.061in) | SMA connector | CTA | Request Info |
| 8100-0003-000 | Capacitance Probe: ASP-125M-CTA | 125µm (5mils) | 6.35µm (0.25mils) | Max. Range Extension: 10x | @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) | 2.49mm (0.098in) | SMA connector | CTA | Request Info |
| 8100-0004-000 | Capacitance Probe: ASP-250M-CTA | 250µm (10mils) | 12.7µm (0.5mils) | Max. Range Extension: 3x | @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) | 3.53mm (0.139in) | SMA connector | CTA | Request Info |
| 8100-0005-000 | Capacitance Probe: ASP-500M-CTA | 500µm (20mils) | 25.4µm (1mils) | Max. Range Extension: 4x | @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) | 5.00mm (0.197in) | SMA connector | CTA | Request Info |
| 8100-0006-000 | Capacitance Probe: ASP-1250M-CTA | 1250µm (50mils) | 63.5µm (2.5mils) | Max. Range Extension: 2x | @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) | 7.98mm (0.314in) | SMA connector | CTA | Request Info |
| 8100-0007-000 | Capacitance Probe: ASP-2500M-CTA | 2500µm (100mils) | 127µm (5mils) | Max. Range Extension: 2x | @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) | 11.25mm (0.443in) | SMA connector | CTA | Request Info |
| 8100-0008-000 | Capacitance Probe: ASP-5000M-CTA | 5000µm (200mils) | 254µm (10mils) | Max. Range Extension: 2x | @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) | 15.53mm (0.627in) | SMA connector | CTA | Request Info |
| 8100-1001-000 | Capacitance Probe: ASP-25M-CTR | 25µm (1mils) | 1.27µm (0.05mils) | Max. Range Extension: 10x | @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) | 1.09mm (0.043in) | SMA connector | CTR | Request Info |
| 8100-1002-000 | Capacitance Probe: ASP-50M-CTR | 50µm (2mils) | 2.54µm (0.1mils) | Max. Range Extension: 9x | @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) | 1.55mm (0.061in) | SMA connector | CTR | Request Info |
| 8100-1003-000 | Capacitance Probe: ASP-125M-CTR | 125µm (5mils) | 6.35µm (0.25mils) | Max. Range Extension: 10x | @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) | 2.49mm (0.098in) | SMA connector | CTR | Request Info |
| 8100-1004-000 | Capacitance Probe: ASP-250M-CTR | 250µm (10mils) | 12.7µm (0.5mils) | Max. Range Extension: 9x | @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) | 3.53mm (0.139in) | SMA connector | CTR | Request Info |
| 8100-1005-000 | Capacitance Probe: ASP-500M-CTR | 500µm (20mils) | 25.4µm (1mils) | Max. Range Extension: 3x | @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) | 5.00mm (0.197in) | SMA connector | CTR | Request Info |
| 8100-1006-000 | Capacitance Probe: ASP-1250M-CTR | 1250µm (50mils) | 63.5µm (2.5mils) | Max. Range Extension: 2x | @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) | 7.98mm (0.314in) | SMA connector | CTR | Request Info |
| 8100-1007-000 | Capacitance Probe: ASP-2500M-CTR | 2500µm (100mils) | 127µm (5mils) | Max. Range Extension: 2x | @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) | 11.25mm (0.443in) | SMA connector | CTR | Request Info |
| 8100-1008-000 | Capacitance Probe: ASP-5000M-CTR | 5000µm (200mils) | 254µm (10mils) | Max. Range Extension: 2x | @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) | 15.53mm (0.627in) | SMA connector | CTR | Request Info |
| 8100-2001-410 | Capacitance Probe: ASP-25M-ILA | 25µm (1mils) | 1.27µm (0.05mils) | Max. Range Extension: 9x | @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) | 1.09mm (0.043in) | SMA connector | ILA | Request Info |
| 8100-2002-410 | Capacitance Probe: ASP-50M-ILA | 50µm (2mils) | 2.54µm (0.1mils) | Max. Range Extension: 4x | @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) | 1.55mm (0.061in) | SMA connector | ILA | Request Info |
| 8100-2003-410 | Capacitance Probe: ASP-125M-ILA | 125µm (5mils) | 6.35µm (0.25mils) | Max. Range Extension: 2x | @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) | 2.49mm (0.098in) | SMA connector | ILA | Request Info |
| 8100-2004-410 | Capacitance Probe: ASP-250M-ILA | 250µm (10mils) | 12.7µm (0.5mils) | Max. Range Extension: 2x | @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) | 3.53mm (0.139in) | SMA connector | ILA | Request Info |
| 8100-2005-410 | Capacitance Probe: ASP-500M-ILA | 500µm (20mils) | 25.4µm (1mils) | Max. Range Extension: 2x | @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) | 5.00mm (0.197in) | SMA connector | ILA | Request Info |
| 8100-2006-410 | Capacitance Probe: ASP-1250M-ILA | 1250µm (50mils) | 63.5µm (2.5mils) | Max. Range Extension: 2x | @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) | 7.98mm (0.314in) | SMA connector | ILA | Request Info |
| 8100-2007-410 | Capacitance Probe: ASP-2500M-ILA | 2500µm (100mils) | 127µm (5mils) | Max. Range Extension: 2x | @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) | 11.25mm (0.443in) | SMA connector | ILA | Request Info |
| 8100-2008-410 | Capacitance Probe: ASP-5000M-ILA | 5000µm (200mils) | 254µm (10mils) | Max. Range Extension: 2x | @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) | 15.53mm (0.627in) | SMA connector | ILA | Request Info |
| 8100-3001-410 | Capacitance Probe: ASP-25M-ILR | 25µm (1mils) | 1.27µm (0.05mils) | Max. Range Extension: 9x | @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) | 1.09mm (0.043in) | SMA connector | ILR | Request Info |
| 8100-3002-410 | Capacitance Probe: ASP-50M-ILR | 50µm (2mils) | 2.54µm (0.1mils) | Max. Range Extension: 4x | @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) | 1.55mm (0.061in) | SMA connector | ILR | Request Info |
| 8100-3003-410 | Capacitance Probe: ASP-125M-ILR | 125µm (5mils) | 6.35µm (0.25mils) | Max. Range Extension: 2x | @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) | 2.49mm (0.098in) | SMA connector | ILR | Request Info |
| 8100-3004-410 | Capacitance Probe: ASP-250M-ILR | 250µm (10mils) | 12.7µm (0.5mils) | Max. Range Extension: 2x | @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) | 3.53mm (0.139in) | SMA connector | ILR | Request Info |
| 8100-3005-410 | Capacitance Probe: ASP-500M-ILR | 500µm (20mils) | 25.4µm (1mils) | Max. Range Extension: 2x | @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) | 5.00mm (0.197in) | SMA connector | ILR | Request Info |
| 8100-3006-410 | Capacitance Probe: ASP-1250M-ILR | 1250µm (50mils) | 63.5µm (2.5mils) | Max. Range Extension: 2x | @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) | 7.98mm (0.314in) | SMA connector | ILR | Request Info |
| 8100-3007-410 | Capacitance Probe: ASP-2500M-ILR | 2500µm (100mils) | 127µm (5mils) | Max. Range Extension: 2x | @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) | 11.25mm (0.443in) | SMA connector | ILR | Request Info |
| 8100-3008-410 | Capacitance Probe: ASP-5000M-ILR | 5000µm (200mils) | 254µm (10mils) | Max. Range Extension: 2x | @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) | 15.53mm (0.627in) | SMA connector | ILR | Request Info |
| 8100-4001-410 | Capacitance Probe: ASP-25M-PSR | 25µm (1mils) | 1.27µm (0.05mils) | Max. Range Extension: 9x | @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) | 1.09mm (0.043in) | SMA connector | PSR | Request Info |
| 8100-4002-410 | Capacitance Probe: ASP-50M-PSR | 50µm (2mils) | 2.54µm (0.1mils) | Max. Range Extension: 4x | @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) | 1.55mm (0.061in) | SMA connector | PSR | Request Info |
| 8100-4003-410 | Capacitance Probe: ASP-125M-PSR | 125µm (5mils) | 6.35µm (0.25mils) | Max. Range Extension: 2x | @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) | 2.49mm (0.098in) | SMA connector | PSR | Request Info |
| 8100-4004-410 | Capacitance Probe: ASP-250M-PSR | 250µm (10mils) | 12.7µm (0.5mils) | Max. Range Extension: 2x | @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) | 3.53mm (0.139in) | SMA connector | PSR | Request Info |
| 8100-4005-410 | Capacitance Probe: ASP-500M-PSR | 500µm (20mils) | 25.4µm (1mils) | Max. Range Extension: 2x | @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) | 5.00mm (0.197in) | SMA connector | PSR | Request Info |
| 8100-4006-410 | Capacitance Probe: ASP-1250M-PSR | 1250µm (50mils) | 63.5µm (2.5mils) | Max. Range Extension: 2x | @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) | 7.98mm (0.314in) | SMA connector | PSR | Request Info |
| 8100-4007-410 | Capacitance Probe: ASP-2500M-PSR | 2500µm (100mils) | 127µm (5mils) | Max. Range Extension: 2x | @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) | 11.25mm (0.443in) | SMA connector | PSR | Request Info |
| 8100-4008-410 | Capacitance Probe: ASP-5000M-PSR | 5000µm (200mils) | 254µm (10mils) | Max. Range Extension: 2x | @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) | 15.53mm (0.627in) | SMA connector | PSR | Request Info |
Model Specifications: Push/Pull Capacitance Probes
| P/N | Model | Measurement Range | Linearity | Min. Range | Stand-Off | Spot Size | Interface | Type | Request Info |
|---|---|---|---|---|---|---|---|---|---|
| 8200-2104-420 | PP Probe: ASP-250MD-ILA/PP | 250µm (10mils) | 0.02% FSR | 25µm (1mils) | Max. Range Extension: 7x | 9.45 mm | SMA connectors | ILA | Request Info |
| 8200-2114-420 | PP Probe: ASP-250MD-ILA/PP Ext | 250µm (10mils) | 0.02% FSR | 25µm (1mils) | Max. Range Extension: 8x | 11.58 mm | SMA connectors | ILA | Request Info |
| 8200-3104-420 | PP Probe: ASP-250MD-ILR/PP | 250µm (10mils) | 0.02% FSR | 25µm (1mils) | Max. Range Extension: 7x | 7.11 mm | SMA connectors | ILR | Request Info |
| 8200-2109-420 | PP Probe: ASP-350MD-ILA/PP | 350µm (14mils) | 0.02% FSR | 35µm (1.4mils) | Max. Range Extension: 7x | 11.58 mm | SMA connectors | ILA | Request Info |
| 8200-2003-420 | PP Probe: ASP-125MR-ILA/PP | 125µm (5mils) | 0.02% FSR | 12.5µm (0.5mils) | Max. Range Extension: 7x | 7.42 mm | SMA connectors | ILA | Request Info |
| 8200-2004-420 | PP Probe: ASP-250MR-ILA/PP | 250µm (10mils) | 0.02% FSR | 25µm (1mils) | Max. Range Extension: 7x | 10.26 mm | SMA connectors | ILA | Request Info |
| 8200-2014-420 | PP Probe: ASP-250MR-ILA/PP Ext | 250µm (10mils) | 0.02% FSR | 25µm (1mils) | Max. Range Extension: 8x | 12.83 mm | SMA connectors | ILA | Request Info |
| 8200-2005-420 | PP Probe: ASP-500MR-ILA/PP | 500µm (20mils) | 0.02% FSR | 50µm (2mils) | Max. Range Extension: 7x | 16.15 mm | SMA connectors | ILA | Request Info |
| 8200-2111-420 | PP Probe: ASP-200MD-ILA/PP/HT | 200µm (8mils) | 0.02% FSR | 20µm (0.8mils) | *Max. Range Extension: 10x | 6.5 mm | SMA connectors | ILA | Request Info |
Model Specifications: Flat Capacitance Probes
| P/N | IMAGE | MODEL | PRODUCT DESCRIPTION |
|---|---|---|---|
| 8000-6890 |  | SMA-Female to BNC-Male | For connecting Digital Series probes to MTI analog Amplifiers |
| 8000-6891-410 |  | SMA-Female to SMA-Male | Extension Cables, 1 meter |
| 8000-6891-420 | | SMA-Female to SMA-Male | Extension Cables, 2 meters |
| 8000-6891-440 | | SMA-Female to SMA-Male | Extension Cables, 4 meters |
| 8000-6952 |  | KD-CH4D | Precision fixture that secures capacitance probes sensor and accurately varies the position of a target relative to the sensor. It provides an excellent means of obtaining calibration data at the user’s facility. |
 | Accumeasure System 9000 is a high-resolution, capacitance-based instrument that provides the perfect solution to many previously unattainable measurement applications. Rapid response time and extremely low noise levels make it ideal for… |
 | The Accumeasure MicroCap is a compact, custom designed, OEM capacitance board for high-precision non-contact displacement, thickness and gap measurement. The AccumeasureTM Microcap capacitance board allows rapid deployment for OEMs… |
 | The Accumeasure TM 500 compact multi channel capacitance rack system accepts up to 6 capacitance amplifiers. Capacitance sensors are used to measure position, thickness, dynamic motion, vibration, run-out of conductive and semi-conducting… |
 | The Accumeasure D capacitance displacement sensor series amplifier is a truly new revolutionary design that uses the latest technology to convert a highly reliable capacitive electric field measurement (displacement) directly into a highly precise… |
ACCUMEASURE Capacitance Probes for ACCUMEASURE D-series
MTI Instruments excels in precision measurement technology, and our ACCUMEASURE Capacitance Probes designed for the ACCUMEASURE D-series stand at the pinnacle of accuracy and reliability. These probes are engineered to deliver fantastic performance in non-contact displacement and position measurements. With an innovative design that reduces temperature drift and increases durability, ACCUMEASURE Capacitance Probes ensure consistent and precise readings even in the most challenging environments.
Ideal for applications ranging from semiconductor production to precision machining, these probes offer a versatile solution for your measurement needs, providing high resolution and stability over a wide range of operating conditions. Learn more about our probes for the ACCUMEASURE D-series when you speak with MTI Instruments today.
Standard Capacitance Probes
The Standard Capacitance Probes from MTI Instruments represent a benchmark in non-contact measurement technology. Crafted with wonderful attention to detail, these probes offer a robust solution for accurately measuring displacement, position, and vibration across various industries. Their versatility makes them suitable for a wide array of applications, including machine tool error analysis, vibration measurement, and precision thickness measurement. The probes feature a user-friendly design, ensuring easy installation and integration into existing systems. With exceptional sensitivity and stability, the Standard Capacitance Probes deliver reliable data, enabling businesses to enhance product quality and operational efficiency.
Push-Pull Probes
MTI Instruments’ Push-Pull Probes are a revolutionary advancement in capacitance-based measurement technology. Designed to provide bidirectional measurements, these probes can simultaneously measure the distance to both sides of a gap, making them uniquely suited for applications requiring precise gap measurements, such as brake pad wear analysis or head-disk spacing in hard disk drives. The Push-Pull Probes feature a dual-sensor design that compensates for common mode errors, offering superior accuracy and repeatability. Their robust construction ensures long-term reliability in harsh conditions, making them an invaluable tool for engineers and technicians seeking precise, dependable measurements.
MTI Instruments Flat Capacitance Probes
The Flat Capacitance Probes by MTI Instruments redefine the standards for surface and displacement measurements. These probes are designed for applications requiring high-precision flatness, bow, and warp measurements. Featuring a low-profile sensor head, they are ideal for tight spaces where traditional probes cannot fit. The innovative design minimizes sensitivity to changes in temperature and pressure, ensuring accurate readings in diverse operating environments. Whether for semiconductor wafer inspection or flat panel display manufacturing, the Flat Capacitance Probes provide the accuracy, reliability, and versatility needed to meet the stringent demands of modern industries.
Explore More of MTI’s Collection of Products
Beyond capacitance displacement and gap measurement probes, MTI Instruments offers a comprehensive range of precision measurement solutions. From advanced turbine engine balancing systems to sophisticated rotation and vibration analysis equipment, MTI’s portfolio includes tools essential for enhancing productivity and ensuring the highest levels of quality control. Each product is a testament to our commitment to innovation, precision, and reliability, designed to address the complex challenges faced by industries worldwide. By exploring MTI’s collection, businesses can find proper solutions that drive operational excellence and lead to a competitive advantage in numerous areas.
Get Your Capacitance Displacement and Gap Measurement Probes Today
For companies and professionals demanding the highest quality in capacitance displacement and gap measurement probes, MTI Instruments stands as the one and only choice. With a legacy of innovation and a focus on delivering advanced measurement solutions, MTI empowers industries to achieve precision and excellence in their operations. Contact MTI Instruments today to discover how our capacitance probes can elevate your measurement capabilities and contribute to your success.