The Accumeasure product line features capacitive sensor products for high resolution non-contact gap, displacement and material thickness measurements that require a high level of accuracy that is both stable and repeatable.
The solution can be used in multitude of environments including magnetic fields, varying temperatures and humidity, nuclear radiation, and high- and low-pressure environments. In addition, MTI offers probes for both grounded and ungrounded or poorly grounded targets.
Common applications include:
Photolithography board positioning and focusing, substrate thickness measurement, wafer bow and warp detection, battery separator thickness measurement, wind turbine stator and rotor gap measurement, glass thickness, piezo stage displacement measurement, spindle run out, tolerances of armature gaps, in-situ particle detection, brake rotors surface deformation and more.