Application: Semiconductor Fabrication Capital Equipment
Capacitance sensors play a crucial role in semiconductor manufacturing processes for various for various applications. They are utilized for measuring and monitoring parameters such as film thickness, displacement and wafer-to-wafer uniformity.
MTI Instruments’ Accumeasure product line features capacitive sensor products for high resolution gap and displacement measurements that require a high level of accuracy that is both stable and repeatable. Capacitive measurements can be performed in a multitude of environments using non-contact passive capacitance probes that are not affected by magnetic fields, temperature, humidity, nuclear radiation or pressure.
Extremely high-precision and high linearity amplifiers make these systems ideal for critical measurements in X-Y stages, rotating spindles, shaft position,
armature gap, disk position, and piezo electric positioning applications. MTI’s Accumeasure product line delivers a highly stable, accurate, low noise amplifer with a fast response time.