Semiconductor Industry Applications

Vitrek offers a variety of products supporting the semiconductor industry for quality control of the fabrication process as well as testing and verification of semiconductor devices’ operational performance as well as supporting the performance of capital equipment use in the semiconductor manufacturing process.  Some Vitrek product applications include:

Semiconductor Wafer Metrology

  • Monitoring wafers during preparation stages to check thickness for compliance with minimal bow, warp and total thickness variation (TTV).
  • In-process monitoring of solar/photovoltaic wafer measuring for multi-channel thickness, TTV & bow measurement.
  • Ultrasonic, non-destructive inspection of wafers for potential flaws or manufacturing defects.

Semiconductor Test & Characterization

  • Operational testing and characterization of packaged semiconductor devices.
  • Software utilized in high-speed PASS/FAIL testing systems.
  • Signal simulation for calibrating data acquisition systems and providing precision voltages for device testing.
  • Real-time acquisition and analysis of storage media read-and-write head signals in manufacturing.
  • Real-time ultrasonic characterization of semiconductor die adhesion in manufacturing.

Semiconductor Fabrication Capital Equipment

  • Sensors used in the high-resolution focusing of complex lens systems used in photolithography tools.
  • Sensors utilized to deliver precise measurements of displacement, active vibration, position and distance.
  • Digitizers used in real-time process control allowing for characterization of fabrication processes and short data latency to enable fast device control loops.
  • Design and production testing in a wide range of fabrication gear.
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How is Vitrek Supporting the CHIP Act?

Vitrek is a US-based company. We design, build, calibrate, repair, and support all our products right here in North America. Our parts have full traceability, and we only use authorized components in all our products.

Vitrek has been serving the Semiconductor market for decades and our reputation for quality and reliability is well known in the industry. To this point, we look forward to serving all Semiconductor manufacturers that are looking for US-based suppliers that can meet their most demanding capability needs. We look forward to accelerating their buildout efforts around Semiconductor Research Centers and Manufacturing plants in the United States.

Test & Measurement Technologies Flyer for the Semiconductor Industry

Whitepaper: Semiconductor Wafer Measurement for Increased Productivity

Semiconductor Wafer Measurement Whitepaper Logo

Article: High-Performance Digitizers in Semiconductor Manufacturing Applications

Products

Accumeasure
Capacitance Sensors

Application: Semiconductor Fabrication Capital Equipment

MTI Instruments Accumeasure Capacitance Product Family

Accumeasure is a capacitive sensor product line that measures gap and displacement with high accuracy, stability and repeatability. It uses non-contact probes that are immune to various environmental factors, including magnetic fiels, temperature, humidity, nuclear radiation or pressure.

Extremely high-precision and high linearity amplifiers make these systems ideal for critical measurements in X-Y stages, rotating spindles, shaft position, armature gap, disk position, and piezo electric positioning applications.

Proforma 300iSA
Semiconductor Metrology System

Application: Semiconductor Wafer Metrology

The semi-automatic Proforma 300iSA is a non-contact desktop, wafer measurement system that enables precise and accurate measurements of wafer dimensions, surface topography, film thickness, and other parameters. Proformas are commonly used at multiple stages of the fabrication process and are upgradable to automated systems.

The Proforma 300 delivers 3-D mapping of thickness, thickness variation, bow, warp, site and global flatness with up to 1000 μm accuracy.

The quick and easy-to-use Windows-based control system performs complex data analysis and provides output in tabular and 3-D graphical formats which can be exported to a variety of spreadsheets and word processing programs.  Remote data analysis and recipe creation is possible based on the high-speed networking capability of the system.

Proforma 300i
Manual Semiconductor Metrology System

Application: Semiconductor Wafer Metrology

Proforma 300i

Supported Wafer Sizes: 3”-12”
Wafer Materials: Si, Ge, InP, GaAs
Measurement Features: Thickness; Bow;

When you need a cost-effective alternative to a fully-automated wafer measurement and inspection system, the MTI Proforma 300i is the solution for you! The 300i can provide measurements of thickness and bow of all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and sapphire or tape.

The Proforma 300i wafer thickness gauge is a capacitance based, differential measurement system that performs non-contact thickness measurements of
semiconducting and semi-insulating wafers. By utilizing MTI’s Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent
electrical ground, resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating
software and Ethernet network interface capability.

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High Speed
Digitizers

Application: Wafer Metrology, Test & Characterization, Fabrication

GaGe high-performance digitizers are renowned for sustaining the maximum effective number of bits over a wide signal frequency range with low-noise signal conditioning and fidelity features.

With sampling rates up to 6 GS/s and very deep onboard acquisition memory of up to 16 GB, our high speed PCIe and PXIe digitizers provide optimal combinations of high sampling speeds with 8, 12, 14 and 16-bit high resolution rates and high-speed data streaming capabilities.

Also referred to as high-speed data acquisition systems or oscilloscopes, the GaGe digitizer cards enable engineers to observe and measure the behavior of semiconductor devices and circuits in real-time, facilitating design validation, performance analysis, and rapid response troubleshooting.

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PA Series
Power Analyzers

Application: Semiconductor Test & Characterization

The PA920 precision harmonic power analyzer, is the most accurate power analyzer available on the market today (0.024%).  The PA920’s modular design can hold up to 4 channels of power measurement in any combination of different channel card types. It is flexible, easy-to-use and provides high-performance — at a price that won’t break your budget.

The PA920 is the workhorse of power analyzers. It can operate from uW to MW. It’s six test instruments in one: 1) Power Analyzer, 2) Oscilloscope, 3) Data Logger, 4) Conducted Emissions Analyzer, 5) Spectrum Analyzer and 6) Phase Meter. It is also small, light, accurate and easy-to-use.

DL Series
Electronic DC Load

Application: Semiconductor Test & Characterization

The DL Series of DC electronic load devices provide wide dynamic range of controllable loading from 10 µW to 14.5 kV. The DL Series is equipped with an easy-to-read color display and is a combined load, four five-digit meters, an oscilloscope and a datalogger in one compact, easy-to-use instrument.

The high speed, high accuracy DL Series products offer transient and non-linear loading capabilities and sweep feature. The highly accurate (0.035% base voltage and current accuracies) enables use in a wide range of applications from production line settings to the engineering bench.

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1510A
Signal Simulators

Application: Semiconductor Test & Characterization

Signal simulators are essential tools in semiconductor manufacturing for testing and verifying the performance of semiconductor devices and circuits. They are used to generate and simulate electrical signals that mimic real-world conditions, allowing engineers to assess the functionality and reliability of their designs before fabrication.

The 1510A Signal Simulator is a sophisticated two-channel, battery-powered, microprocessor-controlled direct digital signal generator that can be used for calibrating data acquisition systems and providing precision voltages for device testing. It can generate a sine wave, a square wave, a sawtooth wave and triangle continuous signals on both channels as well as single pulse and odd pulses.

Resources

  • CHIPS for America Logo

CHIPS Act

CHIPS for AMERICA CHIPS: Investments in innovation, resilience, and a more competitive American future. Vitrek Supports US Semiconductor Manufacturers! Vitrek brands have supported semiconductor manufacturers like Intel, NVIDIA, Samsung, Qualcomm and others for [...]

Semiconductor Industry Applications

Semiconductor Industry Applications Vitrek offers a variety of products supporting the semiconductor industry for quality control of the fabrication process as well as testing and verification of semiconductor devices' operational performance [...]

  • Semiconductor Wafer Measurement

The Cost of Failing to Inspect Semiconductor Wafers

This is the second of three articles in Semiconductor Wafer Measurement for Increased Profitability. The first article in this series explains why disc geometry matters. The third article describes the benefits of using semi-automated, fully-automated, and manual systems for [...]

  • coplanarity

Capacitance Sensors Facilitate 3D IC Construction

Capacitance Sensors Facilitate 3D IC Construction Semiconductor, Research & Development 3D IC Construction Distance, Positioning, Displacement Description [Application Note 70518] To boost device performance, today's [...]

  • 11 - probe_gap

LED SUBSTRATE THICKNESS

Industry Semiconductor Applications Photolithography Using Capacitance Sensors Measurement Type Positioning Description Remember that old acronym, GIGO?  Garbage in garbage out, it can apply to [...]

LITHOGRAPHY OPTICS POSITION FOCUS

Industry Semiconductor Applications Photolithography Using Capacitance Sensors Measurement Type Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex [...]

  • Wafer Measurements

Thickness and TTV of Semiconducting Wafers

Thickness and TTV of Semiconducting Wafers Semiconductor Thickness And TTV Of Semiconducting Wafers Thickness Description Introduction:  Silicon wafers are ordinarily highly conductive and easy to [...]

  • Microchip

Lithography Optics Position Focus

Lithography Optics Position Focus Semiconductor Lithography Optics Position Focus Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex lens [...]

  • 270-958

Wafer Measurement – Ungrounded

Wafer Measurement - Ungrounded Semiconductor Wafer Measurement - Ungrounded Metrology Description MTI Instruments Inc. has developed a thickness measurement device that eliminates the effect of [...]

Wafer Thickness, Bow, Warp And TTV

Semiconductor Wafer Thickness, Bow, Warp And Ttv Surface Description Thickness Measurement ASTM F657: The distance through a wafer between corresponding points on the front [...]

  • Conveyor Belt

Tape Cartridge Movement

Tape Cartridge Movement Semiconductor Tape Cartridge Movement Positioning Description Researchers are presently working on drives with track widths in the 5 to 1 micron region. For [...]

  • Cutouts

Wafer QA/QC After Slicing And Polishing

Wafer QA/QC After Slicing And Polishing Semiconductor Wafer Qa/Qc After Slicing And Polishing Surface Description Introduction: When wafers are sliced up with wire saws, they are [...]

  • Circuit Board

Wire Bonding

Wire Bonding Semiconductor Wire Bonding Level Description Introduction:  Machine automation frequently involves measuring small distances extremely accurately. Wire Bonding is one such application with some challenging [...]

  • Stack of black discs

GaAs Substrate Thickness Measurement

GaAs Substrate Thickness Measurement Semiconductor Gaas Substrate Thickness Measurement Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction:  Silicon wafers are ordinarily highly conductive [...]

  • LED Light Strip

LED Substrate Thickness

LED Substrate Thickness Semiconductor Led Substrate Thickness Thickness Description Remember that old acronym, GIGO?  Garbage in garbage out, it can apply to raw materials as [...]

  • Microchips

Photolithography Using Capacitance Sensors

Photolithography Using Capacitance Sensors Semiconductor Photolithography Using Capacitance Sensors Positioning Description When it comes to photolithography, how accurate are our sensors? Accurate enough to measure [...]

WAFER MEASUREMENT – UNGROUNDED

Industry Semiconductor Applications Wafer Measurement – Ungrounded Measurement Type Metrology Description MTI Instruments Inc. has developed a thickness measurement device that eliminates the effect [...]

Measure Wafer Bow, Warp and TTV with Capacitance

The flatness of silicon wafers used to manufacture integrated circuits is controlled to tight tolerances to help ensure that the whole wafer is sufficiently flat for lithographic processing. To ensure your wafer manufacturing process [...]

  • backup - Wafer-Manufacturing

Five Common Mistakes with Semiconductor Wafer Measurement

Semiconductor wafer measurement requires a high degree of precision. The right metrology equipment and inspection processes are important, but so is procedural consistency and attention to detail. If you’re not getting the results you [...]

Laser Thickness Gauge System Principles

Microtrak™ 3 TGS The Microtrak™ 3 TGS system is specifically designed for thickness applications utilizing two lasers. The product can be used in a standalone configuration or easily interfaced with PLCs and PCs. Each module [...]

Capacitance Guide for Industrial Applications

Accumeasure Digital Capacitance System D Series Gen 3 View Product Capacitance Displacement and Gap Measurement Probes View Product Accumeasure Analog Capacitance System View Product Basic Principles [...]

Product Education & Training

Education & Training Vibration Measurement & Engine Rotor Balancing High-Speed Data Acquisition Products for Streaming Applications Industry Application Webinars Test & Measurement Solutions for [...]