Skip to content
Vitrek offers a variety of products supporting the semiconductor industry for quality control of the fabrication process as well as testing and verification of semiconductor devices’ operational performance as well as supporting the performance of capital equipment use in the semiconductor manufacturing process. Some Vitrek product applications include:
Semiconductor Wafer Metrology
- Monitoring wafers during preparation stages to check thickness for compliance with minimal bow, warp and total thickness variation (TTV).
- In-process monitoring of solar/photovoltaic wafer measuring for multi-channel thickness, TTV & bow measurement.
- Ultrasonic, non-destructive inspection of wafers for potential flaws or manufacturing defects.
Semiconductor Test & Characterization
- Operational testing and characterization of packaged semiconductor devices.
- Software utilized in high-speed PASS/FAIL testing systems.
- Signal simulation for calibrating data acquisition systems and providing precision voltages for device testing.
- Real-time acquisition and analysis of storage media read-and-write head signals in manufacturing.
- Real-time ultrasonic characterization of semiconductor die adhesion in manufacturing.
Semiconductor Fabrication Capital Equipment
- Sensors used in the high-resolution focusing of complex lens systems used in photolithography tools.
- Sensors utilized to deliver precise measurements of displacement, active vibration, position and distance.
- Digitizers used in real-time process control allowing for characterization of fabrication processes and short data latency to enable fast device control loops.
- Design and production testing in a wide range of fabrication gear.
How is Vitrek Supporting the CHIP Act?
Vitrek is a US-based company. We design, build, calibrate, repair, and support all our products right here in North America. Our parts have full traceability, and we only use authorized components in all our products.
Vitrek has been serving the Semiconductor market for decades and our reputation for quality and reliability is well known in the industry. To this point, we look forward to serving all Semiconductor manufacturers that are looking for US-based suppliers that can meet their most demanding capability needs. We look forward to accelerating their buildout efforts around Semiconductor Research Centers and Manufacturing plants in the United States.
Products
Accumeasure
Capacitance Sensors
Capacitance Sensors
Application: Semiconductor Fabrication Capital Equipment
Accumeasure is a capacitive sensor product line that measures gap and displacement with high accuracy, stability and repeatability. It uses non-contact probes that are immune to various environmental factors, including magnetic fiels, temperature, humidity, nuclear radiation or pressure.
Extremely high-precision and high linearity amplifiers make these systems ideal for critical measurements in X-Y stages, rotating spindles, shaft position, armature gap, disk position, and piezo electric positioning applications.
Proforma 300iSA
Semiconductor Metrology System
Semiconductor Metrology System
Application: Semiconductor Wafer Metrology
The semi-automatic Proforma 300iSA is a non-contact desktop, wafer measurement system that enables precise and accurate measurements of wafer dimensions, surface topography, film thickness, and other parameters. Proformas are commonly used at multiple stages of the fabrication process and are upgradable to automated systems.
The Proforma 300 delivers 3-D mapping of thickness, thickness variation, bow, warp, site and global flatness with up to 1000 μm accuracy.
The quick and easy-to-use Windows-based control system performs complex data analysis and provides output in tabular and 3-D graphical formats which can be exported to a variety of spreadsheets and word processing programs. Remote data analysis and recipe creation is possible based on the high-speed networking capability of the system.
Proforma 300i
Manual Semiconductor Metrology System
Manual Semiconductor Metrology System
Application: Semiconductor Wafer Metrology
Supported Wafer Sizes: 3”-12”
Wafer Materials: Si, Ge, InP, GaAs
Measurement Features: Thickness; Bow;
When you need a cost-effective alternative to a fully-automated wafer measurement and inspection system, the MTI Proforma 300i is the solution for you! The 300i can provide measurements of thickness and bow of all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and sapphire or tape.
The Proforma 300i wafer thickness gauge is a capacitance based, differential measurement system that performs non-contact thickness measurements of
semiconducting and semi-insulating wafers. By utilizing MTI’s Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent
electrical ground, resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating
software and Ethernet network interface capability.
.
High Speed
Digitizers
Digitizers
Application: Wafer Metrology, Test & Characterization, Fabrication
GaGe high-performance digitizers are renowned for sustaining the maximum effective number of bits over a wide signal frequency range with low-noise signal conditioning and fidelity features.
With sampling rates up to 6 GS/s and very deep onboard acquisition memory of up to 16 GB, our high speed PCIe and PXIe digitizers provide optimal combinations of high sampling speeds with 8, 12, 14 and 16-bit high resolution rates and high-speed data streaming capabilities.
Also referred to as high-speed data acquisition systems or oscilloscopes, the GaGe digitizer cards enable engineers to observe and measure the behavior of semiconductor devices and circuits in real-time, facilitating design validation, performance analysis, and rapid response troubleshooting.
.
PA Series
Power Analyzers
Power Analyzers
Application: Semiconductor Test & Characterization
The PA920 precision harmonic power analyzer, is the most accurate power analyzer available on the market today (0.024%). The PA920’s modular design can hold up to 4 channels of power measurement in any combination of different channel card types. It is flexible, easy-to-use and provides high-performance — at a price that won’t break your budget.
The PA920 is the workhorse of power analyzers. It can operate from uW to MW. It’s six test instruments in one: 1) Power Analyzer, 2) Oscilloscope, 3) Data Logger, 4) Conducted Emissions Analyzer, 5) Spectrum Analyzer and 6) Phase Meter. It is also small, light, accurate and easy-to-use.
DL Series
Electronic DC Load
Electronic DC Load
Application: Semiconductor Test & Characterization
The DL Series of DC electronic load devices provide wide dynamic range of controllable loading from 10 µW to 14.5 kV. The DL Series is equipped with an easy-to-read color display and is a combined load, four five-digit meters, an oscilloscope and a datalogger in one compact, easy-to-use instrument.
The high speed, high accuracy DL Series products offer transient and non-linear loading capabilities and sweep feature. The highly accurate (0.035% base voltage and current accuracies) enables use in a wide range of applications from production line settings to the engineering bench.
.
1510A
Signal Simulators
Signal Simulators
Application: Semiconductor Test & Characterization
Signal simulators are essential tools in semiconductor manufacturing for testing and verifying the performance of semiconductor devices and circuits. They are used to generate and simulate electrical signals that mimic real-world conditions, allowing engineers to assess the functionality and reliability of their designs before fabrication.
The 1510A Signal Simulator is a sophisticated two-channel, battery-powered, microprocessor-controlled direct digital signal generator that can be used for calibrating data acquisition systems and providing precision voltages for device testing. It can generate a sine wave, a square wave, a sawtooth wave and triangle continuous signals on both channels as well as single pulse and odd pulses.
Resources
Common Test and Calibration Uses of the 1510A Portable Signal Generator
Introduction As one of the most versatile and powerful hand-held signal generators on the market, the 1510A is a two-channel, battery-powered, microprocessor-controlled direct digital signal generator. It has an average battery life [...]
Article: High-Performance Digitizers in Semiconductor Manufacturing Applications
High-Performance Digitizers in Semiconductor Manufacturing Applications PC-based high-speed, high-resolution digitizers perform critical data acquisition functions during semiconductor fabrication, die packaging, and final chip testing. Introduction Data acquisition is a critical [...]
Press Release: Vitrek Supports the Semiconductor Industry’s Urgent Demand for High-Performance Test Equipment Driven by the CHIPS and Science Act
The $52.7 billion legislation passed in 2022 is driving the expansion of US-based semiconductor sector; Vitrek’s product portfolio includes test and data acquisition products essential for advanced R&D and semiconductor manufacturing.
MTI Instruments Whitepaper: Capacitance Guide for Industrial Applications
Capacitance Guide for Industrial Applications This guide from MTI Instruments explains what you need to know about using electrical capacitance for measurement in industrial applications, including advanced manufacturing. Basic [...]
Whitepaper: Why Capacitance? Benefits and Applications of Digital Capacitive Sensors
Industry applications illustrate the versatility and benefits of today's digital capacitive sensor technology. The electrical capacitance formed between a capacitance probe and target surface varies as a function of the distance, or gap, between those two surfaces.
CHIPS Act
CHIPS for AMERICA CHIPS: Investments in innovation, resilience, and a more competitive American future. Vitrek Supports US Semiconductor Manufacturers! Vitrek brands have supported semiconductor manufacturers like Intel, NVIDIA, Samsung, Qualcomm and others for [...]
Whitepaper: Semiconductor Wafer Measurement for Increased Productivity
Semiconductor Wafer Measurement for Increased Productivity This three-part article describes how manufacturers leverage capacitance-based inspection systems for semiconductor wafers. The article reviews best-practices, consequences of failing to inspect semiconductor wafers [...]
The Cost of Failing to Inspect Semiconductor Wafers
This is the second of three articles in Semiconductor Wafer Measurement for Increased Profitability. The first article in this series explains why disc geometry matters. The third article describes the benefits of using semi-automated, fully-automated, and manual systems for [...]
Semiconductor Industry Applications
Vitrek offers a variety of products supporting the semiconductor industry for quality control of the fabrication process as well as testing and verification of semiconductor devices' operational performance as well as supporting the [...]
Thickness Gauge Measurement With Conductive Wafers and Thin Films
Thickness Gauge Measurement With Conductive Wafers and Thin Films Consumer Electronics Electronics Parts Profiling Thickness Description Using MTI's capacitive thickness gauge Proforma 300i with conductive [...]
Semiconductor Wafer Lapping and Displacement Measurement
Semiconductor Wafer Lapping and Displacement Measurement Semiconductor Semiconductor Wafer Manufacturing Displacement Description Semiconductor Wafer Lapping and Displacement Measurement This application note explains how MTI's Accumeasure [...]
Capacitance Sensors Facilitate 3D IC Construction
Capacitance Sensors Facilitate 3D IC Construction Semiconductor, Research & Development 3D IC Construction Distance, Positioning, Displacement Description [Application Note 70518] To boost device performance, today's [...]
MTI’s Accumeasure HD Amplifier vs. SmarAct’s PicoScale Interferometer
MTI's Accumeasure HD Amplifier vs. SmarAct's PicoScale Interferometer Research & Development Piezoceramic, 1-3 Pzt / Polymer Composite And Pvdf Film Amplitude Description This application note [...]
Connecting Encoders to MTI’s Digital Accumeasure
Connecting Encoders to MTI's Digital Accumeasure MTI's Digital Accumeasure D has the ability to accept one or two digital quadrature encoders. The encoders can be linear slide-type or rotary. Digital [...]
Thickness and TTV of Semiconducting Wafers
Thickness and TTV of Semiconducting Wafers Semiconductor Thickness And TTV Of Semiconducting Wafers Thickness Description Introduction:  Silicon wafers are ordinarily highly conductive and easy to [...]
Lithography Optics Position Focus
Lithography Optics Position Focus Semiconductor Lithography Optics Position Focus Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex lens [...]
Push-Pull Capacitance Sensor Measures Ungrounded Targets
Push-Pull Capacitance Sensor Measures Ungrounded Targets Solar, Semiconductor Measurement of Ungrounded Targets Thickness, Metrology Description [Application Note 50318] Today’s semiconductor and solar industries drive the [...]
Wafer Measurement – Ungrounded
Wafer Measurement - Ungrounded Semiconductor Wafer Measurement - Ungrounded Metrology Description MTI Instruments Inc. has developed a thickness measurement device that eliminates the effect of [...]
Wafer Thickness, Bow, Warp And TTV
Semiconductor Wafer Thickness, Bow, Warp And Ttv Surface Description Thickness Measurement ASTM F657: The distance through a wafer between corresponding points on the front [...]
Tape Cartridge Movement
Tape Cartridge Movement Semiconductor Tape Cartridge Movement Positioning Description Researchers are presently working on drives with track widths in the 5 to 1 micron region. For [...]
Wafer QA/QC After Slicing And Polishing
Wafer QA/QC After Slicing And Polishing Semiconductor Wafer Qa/Qc After Slicing And Polishing Surface Description Introduction: When wafers are sliced up with wire saws, they are [...]
Wire Bonding
Wire Bonding Semiconductor Wire Bonding Level Description Introduction:  Machine automation frequently involves measuring small distances extremely accurately. Wire Bonding is one such application with some challenging [...]
GaAs Substrate Thickness Measurement
GaAs Substrate Thickness Measurement Semiconductor Gaas Substrate Thickness Measurement Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction:  Silicon wafers are ordinarily highly conductive [...]
Photolithography Using Capacitance Sensors
Photolithography Using Capacitance Sensors Semiconductor Photolithography Using Capacitance Sensors Positioning Description When it comes to photolithography, how accurate are our sensors? Accurate enough to measure [...]
Hard Drive Position
Semiconductor Hard Drive Position Positioning Description
LED Substrate Thickness
LED Substrate Thickness Semiconductor Led Substrate Thickness Thickness Description Remember that old acronym, GIGO?  Garbage in garbage out, it can apply to raw materials as [...]
About Wafer Bow And Warp Measurement Systems
Semiconductor/Solar Wafer Bow And Warp Metrology/Surface About Wafer Bow And Warp Measurement Systems Thickness Measurement for Metrology Systems ASTM F657: The distance through a wafer between [...]
MTI Video: Wafer Inspection & Metrology Startup (Proforma 300iSA)
https://youtu.be/mawagL6Yg3U
New Video from MTI! Closed-loop System to Monitor and Control Conductive Film Thickness During Manufacturing
Closed-loop System to Monitor and Control Conductive Film Thickness During Manufacturing This animation demonstrates how Accumeasure with capacitance probes can be used as a solution to measure and control conductive film thickness in [...]
LED SUBSTRATE THICKNESS
Industry Semiconductor Applications Photolithography Using Capacitance Sensors Measurement Type Positioning Description Remember that old acronym, GIGO? Garbage in garbage out, it can apply to [...]
WAFER MEASUREMENT – UNGROUNDED
Industry Semiconductor Applications Wafer Measurement – Ungrounded Measurement Type Metrology Description MTI Instruments Inc. has developed a thickness measurement device that eliminates the effect [...]
LITHOGRAPHY OPTICS POSITION FOCUS
Industry Semiconductor Applications Photolithography Using Capacitance Sensors Measurement Type Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex [...]
PHOTOLITHOGRAPHY USING CAPACITANCE SENSORS
Industry Semiconductor Applications Lithography Optics Position Focus Measurement Type Positioning Description When it comes to photolithography, how accurate are our sensors? [...]
High Precision Portable Signal Generators and Calibrators: Everything You Need to Know
High precision portable signal generators are portable electronic devices that generate highly precise signals for testing, system calibration, sensor simulation, troubleshooting, and monitoring. Unlike the benchtop signal generators that are used in laboratories, these [...]
Measuring Glass wafer thickness with a Proforma 300i
Measuring glass substrate thickness with a Proforma 300i Semiconductor Glass Wafer Thickness Measurement Thickness Applications testing of glass (substrate) thickness An applications experiment was made with [...]
Contact vs. Non-Contact Measurement and Linear Displacement Sensors
Contact vs. Non-Contact Measurement and Linear Displacement Sensors Linear displacement sensors are used to measure the distance between two points or two plane surfaces. They use various technologies, but there are two basic types: [...]
Semiconductor Wafer Lapping and Displacement Measurement
Semiconductor Wafer Lapping and Displacement Measurement Semiconductor Semiconductor Wafer Manufacturing Displacement Description Semiconductor Wafer Lapping and Displacement Measurement This application note explains how MTI’s Accumeasure [...]
Measure Wafer Bow, Warp and TTV with Capacitance
The flatness of silicon wafers used to manufacture integrated circuits is controlled to tight tolerances to help ensure that the whole wafer is sufficiently flat for lithographic processing. To ensure your wafer manufacturing process [...]
Product Education & Training
Education & Training Vibration Measurement & Engine Rotor Balancing High-Speed Data Acquisition Products for Streaming Applications Industry Application Webinars Test & Measurement [...]
How to Reduce Inconsistent Wafer Measurements
How to Reduce Inconsistent Wafer Measurements Avoid 5 Common Mistakes That Destroy Wafer Measurement Accuracy You take pride in your work. You’re precise, accurate [...]
Five Common Mistakes with Semiconductor Wafer Measurement
Semiconductor wafer measurement requires a high degree of precision. The right metrology equipment and inspection processes are important, but so is procedural consistency and attention to detail. If you’re not getting the results you [...]
Capacitance Guide for Industrial Applications
Accumeasure Digital Capacitance System D Series Gen 3 View Product Capacitance Displacement and Gap Measurement Probes View Product Accumeasure Analog Capacitance System View Product Basic Principles [...]
3D Integrated Circuits Use Capacitive Sensing to Ensure Coplanarity
Three-dimensional (3D) integrated circuits (ICs) feature silicon wafers and dies that are stacked vertically for improved device performance. By using the Z-axis, 3D ICs can overcome the power and footprint limitations associated with two-dimensional [...]
About Wafer Bow And Warp Measurement Systems
Semiconductor/Solar Wafer Bow And Warp Metrology/Surface About Wafer Bow And Warp Measurement Systems Thickness Measurement for Metrology Systems ASTM F657: The distance through a wafer between [...]
Laser Thickness Gauge System Principles
Microtrak™ 3 TGS The Microtrak™ 3 TGS system is specifically designed for thickness applications utilizing two lasers. The product can be used in a standalone configuration or easily interfaced with PLCs and PCs. Each module [...]