Capacitance Probes vs. Strain Gauges in Piezo Flexure Stages

Capacitance probes with pico-positioning sensors can be embedded in piezo flexure stages. With minor mounting modifications, these non-contact probes provide significantly greater accuracy than strain gauges. Piezo flexure stages are positioning devices with a high degree of resolution. These motion stages contain a piezoelectric actuator that converts an electrical signal into displacement based on [...]