High Resolution Semiconductor Wafer Measurements at Lower Costs
MTI's Proforma technology characterizes semiconductor wafers in terms of bow and warp, thickness, total thickness variation (TTV) and center thickness. Until recently, semiconductor wafer measurements at resolutions less than 100 µm were cost-prohibitive. Moreover, only expensive devices such as interferometers were capable of these measurements. Today, the semiconductor industry can use capacitance gauges instead of laser interferometers to achieve high resolution at fraction of the cost. Much like affordable CCD cameras transformed and expanded the market for video, cost-effective capacitance is disrupting the semiconductor wafer measurement market and creating new opportunities for quality testing and validation. The [...]
Measure Wafer Bow, Warp and TTV with Capacitance GalleryMeasure Wafer Bow, Warp and TTV with Capacitance
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Measure Wafer Bow, Warp and TTV with Capacitance
The flatness of silicon wafers used to manufacture integrated circuits is controlled to tight tolerances to help ensure that the whole wafer is sufficiently flat for lithographic processing. To ensure your wafer manufacturing process is within tolerance, you need to measure the wafers being produced. Various measurement techniques exist to verify process tolerances and eliminate expensive scrap wafers. Non-contact capacitive sensing is a highly precise and cost-effective means to measure wafer flatness, bow, warp, and total thickness variation (TTV). MTI Instruments’ Proforma 300i and 300iSA systems use capacitance sensors to improve yields while reducing costs through better dimensional control of [...]
How to Measure Dielectric Separator Thickness in EV Batteries GalleryHow to Measure Dielectric Separator Thickness in EV Batteries
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How to Measure Dielectric Separator Thickness in EV Batteries
The International Energy Agency predicts that as many as 125 million electric vehicles (EVs) will be on the road by 2030. At the heart of these electric cars, trucks, and buses is the lithium-ion (Li-ion) battery, a type of rechargeable battery with high energy density and low self-discharge. The plates in Li-ion batteries consist of lithium compounds that are applied to either a copper plate substrate (cathode) or an aluminum substrate (anode). In turn, these two plates are separated by a dielectric separator. All of the layers in an EV battery are extremely thin. In fact, the cathode and [...]
Capacitance Sensing Provides Two Ways to Measure EV Battery Plate Thickness GalleryCapacitance Sensing Provides Two Ways to Measure EV Battery Plate Thickness
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Capacitance Sensing Provides Two Ways to Measure EV Battery Plate Thickness
MTI Instruments has released an application note that explains how to use capacitance to measure the thickness of the lithium battery plates in electric vehicles (EVs). Manufacturers need to check these plates for thickness before calendaring them together to ensure that the overall battery diameter is within specifications. In EV batteries, lithium ion compounds are applied to either a copper plate substrate (cathode) or an aluminum substrate (anode plate). These conductive plates are separated by a dielectric. MTI Instruments, a global supplier of precision measurement solutions, makes capacitance sensors that can measure thicknesses materials down to nanometers. Moreover, MTI [...]
Measurements Using Capacitive Sensors
Precise Measurements Using Capacitive Sensors Capacitive sensors can be divided into two categories based upon their performance and intended use. High resolution sensors are typically used in displacement and position monitoring applications where high accuracy, stability and low temperature drift are required. Quite frequently these sensors are used in process monitoring and closed-loop feedback control systems. Proximity type capacitive sensors are much less expensive and are typically used to detect the presence of a part or used in counting applications. Applications Position Sensing General positioning is probably the most [...]
How Aviation MROs Can Maximize Labor Efficiency and Asset Uptime GalleryHow Aviation MROs Can Maximize Labor Efficiency and Asset Uptime
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How Aviation MROs Can Maximize Labor Efficiency and Asset Uptime
MTI Instruments is supplying the aviation industry with solutions to the skilled labor shortage and reduced equipment availability. No, our Lockport, IL company isn’t providing aviation MROs with more flight line personnel, engine mechanics, or Boeing 737 MAX aircraft. Instead, we’re delivering precision measurement solutions that can help MROs to maximize labor productivity and asset uptime. Solving the Skilled Labor Shortage Aviation MROs have a choice. They can wait for training programs to provide new workers, poach workers from competitors, invest in robots, or look for ways to gain greater efficiency from existing labor assets. About 18 months ago, [...]
Trends in High Resolution Sensors for Semiconductor Metrology and Inspection GalleryTrends in High Resolution Sensors for Semiconductor Metrology and Inspection
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Trends in High Resolution Sensors for Semiconductor Metrology and Inspection
High resolution sensors are supporting improvements in semiconductor metrology and inspection at vital points in the production process. Because the fabrication of semiconductor wafers may require hundreds of steps and weeks of manufacturing time, early-stage defects that go undetected can have costly downstream consequences. Plus, because semiconductor processing always requires a high degree of precision, advances in fabrication methods seem to require ever-finer measurements in a never-ending quest. Today’s metrology instruments are incorporating high resolution sensors for automated wafer inspection. Resolution, the smallest measurement that a sensor can reliably indicate, may be given in dimensional units such as nanometers [...]
Fiber Optic Sensor Measures Very Small Movements in Piezo Stacks
MTI Instruments, a global supplier of precision measurement solutions, has released an application note that explains how to measure very small movements in piezo devices that convert mechanical energy into electrical energy. Precision measurement of these dynamic, oscillatory motions is required for the research and development (R&D), testing, and troubleshooting of piezo ceramic materials, advanced ceramics that are used in actuators, sensors, and the power modules of ultrasonic welders. Piezo applications range from automotive sensors and medical devices to engineering projects and consumer products. MTI’s App Note explains how its MTI-2100 Fotonic sensor, when used in conjunction with a [...]
Position, Displacement, and Vibration Measurement with Precision, High Resolution, and Flexibility GalleryPosition, Displacement, and Vibration Measurement with Precision, High Resolution, and Flexibility
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Position, Displacement, and Vibration Measurement with Precision, High Resolution, and Flexibility
The MTI-2100 Fotonic™ sensor uses advanced fiber optics and electronics to precisely measure position, displacement, and vibration. This high-resolution, non-contact metrology system supports a wide range of interchangeable fiber-optic probes and works with almost any surface, including metallic, composite, plastic, glass, ceramic, or liquid. Made in the USA by MTI Instruments, the MTI-2100 Fotonic™ features a modular design and supports application-specific requirements in R&D, quality, and process control. With its dual channel capabilities, the MTI-2100 Fotonic™ sensor allows users to make simultaneous measurements, such as for structure dynamics and modal analysis. All probe modules have two distinct operating ranges [...]
TSC-4800A: Tachometer Signal Conditioner System
TSC-4800A TSC-4800A Programmable Tachometer Signal Conditioner System The state-of-the-art speed resolver and signal conditioning unit built for advanced engine monitoring and testing systems. Deliver accurate, reliable speed conditioning across long-tooth, short-tooth, high-voltage tachometer, and modern offset tooth signals with rapid configuration and seamless digital integration. Request Quote Download Brochure POWERFUL. VERSATILE. FUTURE-PROOF Advanced Programmable Speed Signal Conditioning The TSC-4800A is a state-of-the-art tachometer signal conditioner from MTI Instruments engineered to optimize engine monitoring and testing operations across the aerospace and industrial sectors. Rapidly [...]