High Resolution Semiconductor Wafer Measurements at Lower Costs
MTI's Proforma technology characterizes semiconductor wafers in terms of bow and warp, thickness, total thickness variation (TTV) and center thickness. Until recently, semiconductor wafer measurements at resolutions less than 100 µm were cost-prohibitive. Moreover, only expensive devices such as interferometers were capable of these measurements. Today, the semiconductor industry can use capacitance gauges instead of laser interferometers to achieve high resolution at fraction of the cost. Much like affordable CCD cameras transformed and expanded the market for video, cost-effective capacitance is disrupting the semiconductor wafer measurement market and creating new opportunities for quality testing and validation. The [...]
Measure Wafer Bow, Warp and TTV with Capacitance
The flatness of silicon wafers used to manufacture integrated circuits is controlled to tight tolerances to help ensure that the whole wafer is sufficiently flat for lithographic processing. To ensure your wafer manufacturing process is within tolerance, you need to measure the wafers being produced. Various measurement techniques exist to verify process tolerances and eliminate expensive scrap wafers. Non-contact capacitive sensing is a highly precise and cost-effective means to measure wafer flatness, bow, warp, and total thickness variation (TTV). MTI Instruments’ Proforma 300i and 300iSA systems use capacitance sensors to improve yields while reducing costs through better dimensional control of [...]
How to Measure Dielectric Separator Thickness in EV Batteries
The International Energy Agency predicts that as many as 125 million electric vehicles (EVs) will be on the road by 2030. At the heart of these electric cars, trucks, and buses is the lithium-ion (Li-ion) battery, a type of rechargeable battery with high energy density and low self-discharge. The plates in Li-ion batteries consist of lithium compounds that are applied to either a copper plate substrate (cathode) or an aluminum substrate (anode). In turn, these two plates are separated by a dielectric separator. All of the layers in an EV battery are extremely thin. In fact, the cathode and [...]
Capacitance Sensing for Non-Contact Thickness Measurements of Insulating Materials
Capacitance sensing can be used to make non-contact thickness measurements for most insulating materials. Capacitance sensors are known for their ability to precisely measure the thickness and position of conductive targets, but what’s less known is that these sensors can also measure the thickness of non-conductive materials. Examples include glass, sapphire, and plastics, as well as semi-insulating semiconductor materials such as GaAs and silicon nitride. Analog vs. Digital Technologies MTI Instruments, a global supplier of precision measurement technologies, takes the guesswork out of what used to be a complex measurement for non-conductive materials. MTI's Digital Accumeasure system features a [...]
White Paper: Cable & Connector Test System Facilitates Multi-Point High Voltage/Current Testing
White Paper: Cable & Connector Test System Facilitates Multi-Point High Voltage/Current Testing Introduction Hipot testing is critical in assuring compliance with a host of electrical safety standards and in confirming the assembled product is free from electrical or mechanical defects. Hipot testers are used to measure leakage current and insulation resistance between all components and connections, confirm solid ground connections and test ground bonds. All of these tests require the sequential application of precise and controlled high voltages or currents between pairs of elements then accurately measuring and recording the results. Products like the Vitrek 95x and V7X series [...]
Trends in High Resolution Sensors for Semiconductor Metrology and Inspection
High resolution sensors are supporting improvements in semiconductor metrology and inspection at vital points in the production process. Because the fabrication of semiconductor wafers may require hundreds of steps and weeks of manufacturing time, early-stage defects that go undetected can have costly downstream consequences. Plus, because semiconductor processing always requires a high degree of precision, advances in fabrication methods seem to require ever-finer measurements in a never-ending quest. Today’s metrology instruments are incorporating high resolution sensors for automated wafer inspection. Resolution, the smallest measurement that a sensor can reliably indicate, may be given in dimensional units such as nanometers [...]
Vitrek featured in Appliance & HVAC Report
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Position, Displacement, and Vibration Measurement with Precision, High Resolution, and Flexibility
The MTI-2100 Fotonic™ sensor uses advanced fiber optics and electronics to precisely measure position, displacement, and vibration. This high-resolution, non-contact metrology system supports a wide range of interchangeable fiber-optic probes and works with almost any surface, including metallic, composite, plastic, glass, ceramic, or liquid. Made in the USA by MTI Instruments, the MTI-2100 Fotonic™ features a modular design and supports application-specific requirements in R&D, quality, and process control. With its dual channel capabilities, the MTI-2100 Fotonic™ sensor allows users to make simultaneous measurements, such as for structure dynamics and modal analysis. All probe modules have two distinct operating ranges [...]
How the Aviation Industry Solves Vibration and Balancing Challenges
The aviation industry spends significant amounts of time and money on problems caused by engine vibration. Imbalance, the most common cause of engine vibration, happens because of bird strikes and other impacts, but also because of natural wear and corrosion that redistribute mass. In turn, out-of-balance parts can result in cabin noise, metal fatigue, and cracked turbine, fan, or compressor components. In the most extreme cases, catastrophic engine failure may result MTI Instruments, a worldwide supplier of precision measurement solutions, makes equipment for monitoring vibration levels and balancing rotors. For maintenance, repair and overhaul (MRO) crews who want to [...]
White Paper: Precision Power Analyzers
White Paper All the tools needed to study and optimize virtually any power project in a single instrument Introduction The design of any power conversion system requires the measurement of a large range of electrical parameters that could be made using a lab bench full of instruments. The precision power analyzer pulls all of these measurements into a single instrument replacing meters, oscilloscopes, chart recorders, harmonic analyzers and other devices. This paper will provide a basic overview of the functions and capabilities of high-performance power analyzers. Examples of these functions and how to apply [...]







