Blogs
MTI Instruments Whitepaper: Capacitance Guide for Industrial Applications
Capacitance Guide for Industrial Applications This guide from MTI Instruments explains what you need to know about using electrical capacitance for measurement in industrial applications, including advanced manufacturing. Basic Principles Capacitance is the ratio of the change in an electric charge to the corresponding change in its electrical potential (i.e., voltage). Capacitors, components that that have the “capacity” to store an electric charge, consist of conductive parallel plates that don’t touch or connect with each other. Instead, these metal plates are electrically-separated by air or a layer of insulating material (i.e., the dielectric). MTI’s [...]
Whitepaper: Semiconductor Wafer Measurement for Increased Productivity
Semiconductor Wafer Measurement for Increased Productivity This three-part article describes how manufacturers leverage capacitance-based inspection systems for semiconductor wafers. The article reviews best-practices, consequences of failing to inspect semiconductor wafers and benefits of using semi-automated, fully-automated and manual systems for wafer metrology and inspection. Part 1: Why Disc Geometry Matters in Wafer Production Semiconductor wafers are cut from cylindrical silicon crystals, or ingots. The flatness of these disc-shaped wafers is controlled to tight tolerances to ensure that the entire wafer surface is suitable for integrated circuit (IC) production. If disc geometry is out-of-spec [...]
GAAS SUBSTRATE THICKNESS MEASUREMENT
Industry Semiconductor Applications Gaas Substrate Thickness Measurement Measurement Type Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction: Silicon wafers are ordinarily highly conductive and easy to measure with standard capacitive displacement sensors (See MTI’s Proforma 300i). Measuring the thickness of GaAs wafers that have high bulk resistivity (>10k Ohm/cm) is a little more difficult because the wafers act as non-conductive insulators in a capacitive sensor’s measuring field. Fortunately, MTI has a solution to this problem. Solution: It’s possible to measure the thickness and TTV of high resistivity semiconducting wafers (like GaAs) using non-contact capacitive [...]
MTI Video: Wafer Inspection & Metrology Startup (Proforma 300iSA)
https://youtu.be/mawagL6Yg3U
Machine Tools Characterization
Machine Tools Characterization Customer Case This customer is involved in characterizing machine tools. In order to do this, they need five simultaneous channels capturing 12-bit samples at 50 KSPS, with a 20 us sample width. A total of 5 seconds of data is required. GaGe Case Solution The solution to this problem is a three-card Master/Slave CompuScope 512 system, with each card having 512 Kilosamples of on-board memory. The CompuScope 512 is a 12-bit 5 MSPS A/D card for the ISA bus. As each CompuScope 512 has two channels, this system would provide 6 channels for the customer's application. [...]
Product Education & Training
Education & Training Vibration Measurement & Engine Rotor Balancing High-Speed Data Acquisition Products for Streaming Applications Industry Application Webinars Test & Measurement Solutions for Semiconductor Manufacturers GaGe Digitizers in Ultrasonic Applications Electrical Safety & Compliance Testing for Printed Circuit Board Manufacturers Vitrek Products for Metrologists & Calibration Labs Vitrek Electrical Safety Testing for the Appliance & Consumer Product Industries Compliance Testing for the Lighting Industry Webinar Vitrek [...]
Selecting a Displacement Sensor / Measuring System
Capacitive displacement sensors Capacitive displacement sensors are non-contact devices that are used for measurements at a high-resolution. It can also be used to check the position of any conductive object as well as measure the width or density of non-conductive materials. Capacitive displacement sensors have a large variety of uses including precision thickness measurements, assembly line testing, assembly metrology, and semiconductor processing. Capacitive displacement sensors can be found in manufacturing facilities all around the globe. There’s more to selecting the proper type of displacement sensor and measurement system than meets the eye. To select the appropriate type of device [...]
Target Material and Characteristics
Target Material and Characteristics Transparent/Opaque Targets There are a number of measurement systems that are capable of measuring a target that is opaque. When it comes to transparent targets, the measurement system being used must match the material of the target being measured. For example, if you’re attempting to measure plastic you should use a contact-type measurement system such as a micrometer. When performing a soft target measurement, such as film, a non-contact measurement system (such as a laser displacement sensor) should be utilized. Hard/Soft Targets Objects made out of hard material (such as a block of wood), would [...]
What is Measurement?
Measurement is about determining the quantifiable attributes of a target object. Examples of these attributes include: length weight distance thickness position capacity size The following sections explain more about what measurement is – and isn’t. Why is measurement misunderstood? Sometimes, people use the term “measure” instead of “calculate” or “quantify”. All these terms are related, but they’re not the same. For clarity’s sake, think of measurement as a single action that you perform with instrumentation. Collectively, “instrumentation” describes devices (i.e., instruments) that measure, indicate, and sometimes record values. Today, there are many different types of specialized measuring instruments. Bakers [...]
What is a displacement sensor?
What are Displacement Sensors (Displacement Gauges) and Dimension Measurement Systems? What is a displacement sensor? A displacement sensor (displacement gauge) is primarily used to measure the range of where an object has to travel and in relation to a reference position. Displacement sensors have multiple uses. Its primary use is for dimension measurement to figure out an object’s width, height, and thickness. Accuracy, application and usage environment is required when selecting the best equipment. What is a measurement sensor? A measurement sensor is a device that is used to measure an object to ascertain its dimensions such as by [...]